发明名称 PROTECTIVE FILM FORMING FILM, PROTECTIVE FILM FORMING SHEET AND WORK PRODUCT MANUFACTURING METHOD
摘要 A protective film forming film 1 is provided in which the product of the breaking stress (MPa) measured at a measurement temperature of 0° C. and the breaking strain (unit: %) measured at a measurement temperature of 0° C. in at least one of the protective film forming film 1 and a protective film formed from the protective film forming film 1 is in a range of 1 MPa·% to 250 MPa·%. According to such a protective film forming film 1, the protective film forming film 1 or the protective film formed from the protective film forming film 1 can be suitably divided in an expanding process performed on a workpiece when the workpiece is divided to obtain a work product.
申请公布号 SG11201606470R(A) 申请公布日期 2016.10.28
申请号 SG11201606470R 申请日期 2014.09.03
申请人 LINTEC CORPORATION 发明人 SAIKI, NAOYA;INAO, YOUICHI;YAMAMOTO, DAISUKE;YONEYAMA, HIROYUKI
分类号 H01L21/301;B23K26/53;B32B27/00;C09J7/02 主分类号 H01L21/301
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