发明名称 |
PROTECTIVE FILM FORMING FILM, PROTECTIVE FILM FORMING SHEET AND WORK PRODUCT MANUFACTURING METHOD |
摘要 |
A protective film forming film 1 is provided in which the product of the breaking stress (MPa) measured at a measurement temperature of 0° C. and the breaking strain (unit: %) measured at a measurement temperature of 0° C. in at least one of the protective film forming film 1 and a protective film formed from the protective film forming film 1 is in a range of 1 MPa·% to 250 MPa·%. According to such a protective film forming film 1, the protective film forming film 1 or the protective film formed from the protective film forming film 1 can be suitably divided in an expanding process performed on a workpiece when the workpiece is divided to obtain a work product. |
申请公布号 |
SG11201606470R(A) |
申请公布日期 |
2016.10.28 |
申请号 |
SG11201606470R |
申请日期 |
2014.09.03 |
申请人 |
LINTEC CORPORATION |
发明人 |
SAIKI, NAOYA;INAO, YOUICHI;YAMAMOTO, DAISUKE;YONEYAMA, HIROYUKI |
分类号 |
H01L21/301;B23K26/53;B32B27/00;C09J7/02 |
主分类号 |
H01L21/301 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|