发明名称 Goniometer stage
摘要 A goniometer stage has a tilting axis which can be adjusted to the point of intersection of the optical axis of the objective lens with the focusing plane. A bearing sleeve for a specimen holder rod is seated with its inner end in a ball-like inner bearing and is connected on its outer end with a cylinder of the tilting device via decoupled positioning devices. The rotational movement of the tilting device is transmitted directly, via a metal bellows from the cylinder to the bearing sleeve.
申请公布号 US4771178(A) 申请公布日期 1988.09.13
申请号 US19860946495 申请日期 1986.12.24
申请人 CARL-ZEISS-STIFTUNG 发明人 EGLE, WILHELM;GUETTER, ERNST;ROESNER, HARTMUT
分类号 G01Q70/02;H01J37/20;(IPC1-7):G21K5/08 主分类号 G01Q70/02
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