发明名称 |
Goniometer stage |
摘要 |
A goniometer stage has a tilting axis which can be adjusted to the point of intersection of the optical axis of the objective lens with the focusing plane. A bearing sleeve for a specimen holder rod is seated with its inner end in a ball-like inner bearing and is connected on its outer end with a cylinder of the tilting device via decoupled positioning devices. The rotational movement of the tilting device is transmitted directly, via a metal bellows from the cylinder to the bearing sleeve.
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申请公布号 |
US4771178(A) |
申请公布日期 |
1988.09.13 |
申请号 |
US19860946495 |
申请日期 |
1986.12.24 |
申请人 |
CARL-ZEISS-STIFTUNG |
发明人 |
EGLE, WILHELM;GUETTER, ERNST;ROESNER, HARTMUT |
分类号 |
G01Q70/02;H01J37/20;(IPC1-7):G21K5/08 |
主分类号 |
G01Q70/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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