| 摘要 |
PURPOSE:To improve the instrumentation precision and enable the automatic instrumentation by a method wherein a thermostat, a photocontroller and a capacity/voltage controller are controlled by means of respective computers. CONSTITUTION:A cryostat 3 cooling down a specimen (a) by a thermostat 1 control-driven by a subcomputer 4 provided with a temperature measuring part 2 of the atmosphere of specimem (a) and a heater power supply 3 heating the atmospheric temperature is controlled at a specified temperature. Besides, the title device provided with a light quantity measuring part 7 measuring the light quantity irradiating the specimen (a), a light source power supply 9 supplying a light emitting means 8 irradiating the specimen (a) with monocolor light with stable power and an optical system driving part 10 scan-driving irradiating light on the specimen (a) controls an optical system 12 irradiating the specimen (a) with the monocolor by a photocontroller 6 control-driven by another subcomputer 11. Furthermore, a capacity.voltage controller 13 is drive- controlled by the other subcomputer 17. Through these procedures, the instrumen tation precision can be enhanced while capacitating the title device for the automatic instrumentation.
|
