| 摘要 |
PURPOSE:To lengthen durability by protecting a magnetic sensitive section, the whole surface of a wiring section and the required section of a terminal section by the use of an SiO2 layer and a second film, a composition of which changes in the thickness direction from SiO2 up to Si3N4. CONSTITUTION:The title magnetic sensor has a magnetic sensitive section 2, a wiring section 3 and a terminal section 4, which are formed onto an insulating substrate 1 and respectively have specified shapes and size, a first protective film 6 shaped to the whole surfaces of the magnetic sensitive section 2 and the wiring section 3 and composed of an SiO2 layer formed to the necessary section of the terminal section 4, and a second protective film 7, which is shaped onto the SiO2 layer and a composition of which changes in the thickness direction up to a composition Si3N4 on the outermost side from a composition SiO2 on the side brought into contact with the SiO2 layer. That is, the SiO2 layer 6 has excellent adhesive properties with a ferromagnetic substance material constituting the magnetic sensitive section 2 because the layer 6 is shaped in an innermost layer, and internal stress is relaxed because a composition change film up to Si3N4 from SiO2 is formed. Protection under the environment of a high temperature and high humidity and mechanical protection are improved because Si3N4 is formed in an outermost layer. Accordingly, excellent durability and environmental resistance are acquired.
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