Piezoelectric device, liquid ejecting head, liquid ejecting apparatus and manufacturing method of piezoelectric device

摘要

A piezoelectric device comprising a substrate having two surface sides; a vibration plate on one of the two surface side, a piezoelectric element including a first electrode provided on the vibration plate, a piezoelectric body layer provided on the first electrode, the piezoelectric body layer having a groove section on a side surface, the groove section including a first surface facing to the vibration plate, and a second electrode provided on the piezoelectric body layer, and a stress application film having tensile stress and provided on an inner surface of the groove section.

主权项

1. A piezoelectric device comprising:
a substrate having first and second surface opposite to each other; a vibration plate on the first surface of the substrate; a piezoelectric element including:
a first electrode provided on the vibration plate;a piezoelectric body layer provided on the first electrode;a groove provided on a side surface of the piezoelectric body layer, the groove including a first groove surface facing to the vibration plate; anda second electrode provided on the piezoelectric body layer; and a stress application film having tensile stress and provided on an inner surface of the groove, wherein the stress application film is provided to reach up to an upper surface of the second electrode on a side that is opposite to the piezoelectric body layer, and an opening section is provided in a region of the stress application film that corresponds to a central section of an upper surface of the piezoelectric element.