| 发明名称 | Apparatus and method for separating a stacked arrangement | ||
| 摘要 | In various embodiments, an apparatus for separating a stacked arrangement including a first layer, a second layer and a release layer between the first layer and the second layer may be provided. The apparatus may include an attachment surface configured to suspend the stacked arrangement by attaching to the first layer. The apparatus may further include an actuating mechanism configured to form a curvature of the first layer by bending the attachment surface. The apparatus may also include a holder to hold an etchant for etching the release layer to separate the first layer from the second layer. | ||
| 申请公布号 | US9522521(B2) | 申请公布日期 | 2016.12.20 |
| 申请号 | US201314390239 | 申请日期 | 2013.04.17 |
| 申请人 | Nanyang Technological University | 发明人 | Yoon Soon Fatt;Xu Dawei;Yeo Chiew Yong |
| 分类号 | B32B38/10;B32B43/00;H01L31/18;H01L21/78;H01L21/67 | 主分类号 | B32B38/10 |
| 代理机构 | Alston & Bird LLP | 代理人 | Alston & Bird LLP |
| 主权项 | 1. An apparatus for separating a stacked arrangement comprising a first layer, a second layer and a release layer between the first layer and the second layer, the apparatus comprising: an attachment surface configured to suspend the stacked arrangement by attaching to the first layer, wherein the attachment surface comprises a flexible plate; an actuating mechanism configured to form a curvature of the first layer by bending the attachment surface; and a holder configured to hold an etchant for etching the release layer to separate the first layer from the second layer. | ||
| 地址 | Singapore SG | ||