发明名称 Vapor dryer
摘要 A vapor dryer system in which products to be dried are positioned in a tank and immersed in a hot vapor cloud and saturated with hot vapor, which removes water from the surface of the product as the vapor condenses on the surface. The condensate is collected and diverted to preserve the purity of the solvent reservoir. The vapor is formed from a liquid reservoir which is heated by heat transducer means disposed remotely from the tank to minimize the risk of igniting the vapor.
申请公布号 US4841645(A) 申请公布日期 1989.06.27
申请号 US19870130131 申请日期 1987.12.08
申请人 MICRO CONTAMINATION COMPONENTS INDUSTRIES 发明人 BETTCHER, H. DEAN;BETTCHER, GARY D.;BETTCHER, GALEN D.;BETTCHER, RALPH D.
分类号 F26B21/14;H01L21/00 主分类号 F26B21/14
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