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发明名称
BACK-SCATTER ELECTRONS DETECTOR
摘要
申请公布号
EP0191293(B1)
申请公布日期
1989.08.02
申请号
EP19860100214
申请日期
1986.01.09
申请人
FIRMA CARL ZEISS;CARL-ZEISS-STIFTUNG TRADING AS CARL ZEISS
发明人
KURZ, DIETER, DR.;SCHAFER, NORBERT, DIPL.-ING.
分类号
G01Q80/00;G01Q30/00;G01T1/20;G01T1/202;H01J37/244
主分类号
G01Q80/00
代理机构
代理人
主权项
地址
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