| 摘要 |
PROBLEM TO BE SOLVED: To provide an acoustic wave device capable of retaining air tightness of a vibration space over a long time.SOLUTION: An acoustic wave device 1 comprises: an element substrate 3; an excitation electrode 5 disposed on a principal surface 3a of the element substrate 3; a frame part 2 disposed on the principal surface of the element substrate 3 so as to surround the excitation electrode 5; and a cover 9 having a lid 4 overlapping with the frame part 2 and closing the frame part 2. The frame part 2 has a frame part side convexoconcave part on its top surface and its exterior wall is inclined so as to be directed outward toward the principal surface of the element substrate 3, and the lid 4 has a lid side convexoconcave part on its bottom surface and the lid side convexoconcave part fits into the frame part side convexoconcave part.SELECTED DRAWING: Figure 3 |
