MICROWAVE PLASMA DEVICE,申请号JP19880208735-传众专利搜索

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发明名称	MICROWAVE PLASMA DEVICE
摘要
申请公布号	JPH0256832(A)	申请公布日期	1990.02.26
申请号	JP19880208735	申请日期	1988.08.23
申请人	MATSUSHITA ELECTRIC IND CO LTD	发明人	MUKAI YUJI;TSUDA YOSHIYUKI;KODERA KOICHI;YASUI HIDEAKI
分类号	H01J27/16;H01J37/08	主分类号	H01J27/16
代理机构		代理人
主权项
地址

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