发明名称 METHOD FOR COOLING PRINTING FRAME
摘要 PURPOSE:To uniformly cool a mask film so that the mask film can be regulated to and maintained at an adequate temp. by passing flowing water which absorbs heat rays and allows the transmission of UV rays in the intermediate position between a light source and the printing frame. CONSTITUTION:A work 7 held in tight contact with the mask film 6 crimped between an upper frame 4 and a lower frame 5 of the printing frame is irradiated by the light source 2 of an exposing device. A water tank 9 for cooling which absorbs the heat rays and allows the transmission of the UV rays is provided in the intermediate position between the light source 2 and the printing frame 4 and the flowing water is passed in this position. The heat rays contained in the irradiation light are, therefore, absorbed at the time when the irradiating light from the light source 2 arrives at the mask film 6. The temp. rise of the mask film 6 is prevented in this way and the adequate patterns are printed on the work 7.
申请公布号 JPH02144540(A) 申请公布日期 1990.06.04
申请号 JP19880297949 申请日期 1988.11.25
申请人 ORC MFG CO LTD 发明人 YAZAKI YOSHIO
分类号 G02B5/24;G03F7/20;H01L21/027;H05K7/20 主分类号 G02B5/24
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