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发明名称
PROBE CARD
摘要
申请公布号
JPH02165060(A)
申请公布日期
1990.06.26
申请号
JP19880320962
申请日期
1988.12.20
申请人
NEC CORP
发明人
NAKAMOTO SATOSHI
分类号
G01R31/26;G01R1/073;G01R31/28;H01L21/66
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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