MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT,申请号JP19880325181-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT
摘要
申请公布号	JPH02170435(A)	申请公布日期	1990.07.02
申请号	JP19880325181	申请日期	1988.12.22
申请人	NEC CORP	发明人	KUWABARA ICHIRO
分类号	H01L29/73;H01L21/266;H01L21/28;H01L21/331;H01L29/732	主分类号	H01L29/73
代理机构		代理人
主权项
地址

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