| 摘要 |
PURPOSE:To enhance corrosion resistance of a chromium film and a stainless steel material to a higher degree by forming chromium fluoride film or a calcium fluoride film on the surface of them. CONSTITUTION:The chromium oxide film is formed at a part for leading out an electrode and a vamp made of gold or the like is formed on this film, thus manufacturing a so-called vamp product, and the chromium fluoride films are formed on the surface or the sides of the film by exposing those products in a state of chips or wafers to an atmosphere of gaseous dry hydrofluoric acid or fluorine to prevent phenomenon or corrosion and elution of the film. On the other hand, the chromium fluoride or calcium fluoride film is formed on the inside of a stainless pipe for use in semiconductor manufacture apparatus by the ion plating method to prevent destruction of the pipe and leakage of the gaseous hydrofluoric acid and fluorine due to corrosion in the case of using the pipe for the piping of the gases, thus permitting corrosion resistance of the chromium film and the stainless steel to be enhanced to a higher degree. |
