发明名称 THIN FILM FIELD EFFECT TYPE TRANSISTOR ELEMENT ARRAY
摘要 <p>PURPOSE:To obtain a larger display which does not bring on deterioration of a display quality caused by a write shortage of a signal voltage by forming the whole gate bus line from a metal without increasing a mask pattern exceeding three pieces. CONSTITUTION:On an insulating substrate, a picture element electrode 6b consisting of a transparent conductive film, an island-like gate electrode 2b and a drain bus line 5b are formed. Also, in each intersection part of a thin film field effect type transistor 10 forming part and a gate bus line 3a, and a drain bus line 5b, an island-like insulating layer and a laminated film of a semiconductor layer are formed, and moreover, by a metallic film, drain and source electrodes 14 of the thin film field effect type transistor 10 and the gate bus line 3a are formed. In such a way, by three pieces of masks to be used, the gate bus line can be converted to a low resistance, and a larger display which does not bring on deterioration of a display shortage generated by a write shortage of a signal voltage caused by a propagation delay of a signal pulse can be obtained.</p>
申请公布号 JPH02198430(A) 申请公布日期 1990.08.06
申请号 JP19890019139 申请日期 1989.01.27
申请人 NEC CORP 发明人 MORIYAMA HIROAKI
分类号 G02F1/136;G02F1/1368;G09F9/30;G09F9/35;H01L21/336;H01L27/12;H01L29/78;H01L29/786 主分类号 G02F1/136
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