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经营范围
发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02205040(A)
申请公布日期
1990.08.14
申请号
JP19890024884
申请日期
1989.02.02
申请人
NEC KYUSHU LTD
发明人
KAWASAKI YOICHI;KOSHO JOJI
分类号
H01L21/52
主分类号
H01L21/52
代理机构
代理人
主权项
地址
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