Workpieces e.g. compact discs are entered in and removed from vacuum chambers, e.g. for cathode sputtering deposition, by a circular transport medium. This has through openings. A lifting and supporting element for a holder of a substrate represents an airtight seal for the lock chamber wrt. vacuum chamber.
申请公布号
DE4009603(A1)
申请公布日期
1990.10.04
申请号
DE19904009603
申请日期
1990.03.26
申请人
LEYBOLD AG, 6450 HANAU, DE
发明人
KEMPF, STEFAN, 8755 ALZENAU, DE;ZEJDA, JAROSLAV, 6458 RODENBACH, DE
