发明名称 |
DIELECTRIC SUBSTRATE WITH REDUCED AND STABILIZED SURFACE ELECTRICAL CONDUCTIVITY, PROCESS FOR ITS MANUFACTURE, AND USE OF THE SUBSTRATE |
摘要 |
<p>In order to reduce and stabilize the electrical conductivity of surfaces of crystalline, polycrystalline or amorphous structure in such a way that the reduction and stabilisation is permanent and not affected by solvents or temperature changes, it is proposed that the surface of the substrate is cleaned chemically and brought into contact with chlorotrimethylsilane ((CH3)3ClSi) dissolved in at least one solvent, preferably a low chlorinated hydrocarbon (e.g. chloroform or dichloromethane), and the solvent and the gaseous substances produced by the chemical reaction are allowed to evaporate off. The valencies involved in the chemical reactions at the surface of the substrate are saturated after passivation with (CH3)3Si radicals.</p> |
申请公布号 |
WO9012420(A1) |
申请公布日期 |
1990.10.18 |
申请号 |
WO1990AT00028 |
申请日期 |
1990.04.09 |
申请人 |
AVL GESELLSCHAFT FUER VERBRENNUNGSKRAFTMASCHINEN UN |
发明人 |
SARACOGLU, IBRAHIM, ADNAN |
分类号 |
H01L27/04;H01L21/312;H01L21/822;H01L23/29;H01L41/02;H01L41/18 |
主分类号 |
H01L27/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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