| 摘要 |
<p>PURPOSE:To enable transferring in a small space by rotating a carrier in a vertical state in the manner in which the carrier faces the direction of a transferring mechanism from the direction of carrier delivering. CONSTITUTION:An apparatus is constituted of the following; a boat 4 capable of accommodating a plurality of semiconductor wafers so as to keep specified intervals in the direction of plate thickness, a boat mounting stand 5 capable of ascending and descending in order to carry the boat 4 in and from a reaction tube 1 and capable of moving to a position just under the reaction tube 1 and to a position for wafer transferring, a carrier stand 7 capable of arranging a plurality of carriers 6 capable of accommodating each unit of a plurality of the wafers 3, and a transferring mechanism 8 performing the transferring of the wafer 3 between the carrier 6 and the boat 4. Hence driving in front and rear direction, driving in up and down direction, and rotation driving are required for the transferring mechanism 8, but driving in the XY direction is not necessary. The direction conversion of the carrier 6 is a rotation in the vertical state, so that transferring is possible in a small space, and throughput can be increased.</p> |
