METHOD FOR ALTERING PATTERNS PROVIDED AT A SURFACE OF A CARRIER AND APPARATUS FOR CARRYING IT OUT,申请号EP19870201469-传众专利搜索

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发明名称	METHOD FOR ALTERING PATTERNS PROVIDED AT A SURFACE OF A CARRIER AND APPARATUS FOR CARRYING IT OUT
摘要
申请公布号	EP0257685(B1)	申请公布日期	1991.01.09
申请号	EP19870201469	申请日期	1987.08.03
申请人	N.V. PHILIPS' GLOEILAMPENFABRIEKEN	发明人	SLINGERLAND, HENDRIK NICOLAAS
分类号	G03F1/00;H01J37/305;H01J37/317;H01L21/027	主分类号	G03F1/00
代理机构		代理人
主权项
地址

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