Superconductive multilayer circuit and its manufacturing method.

摘要

A superconductive multilayer circuit has a substrate, a first circuit layer (14) formed on the substrate and having a circuit part (11) formed of a superconductive material and a non-circuit part (13) formed of a simulant of the superconductive material, and at least one second circuit layer (17) formed on the first circuit layer (14), having a circuit part (15) formed of a superconductive material and a non-circuit part (16) formed of a simulant of the superconductive material. A method for manufacturing a superconductive multilayer circuit has a first thin film forming step for forming a thin film, which is composed of a superconductive material or a smaller material thereto, on a substrate, a first circuit layer (14) forming step for forming a superconductive circuit by discharging a specific component from a predetermined part of the thin film or implanting the component in the thin film, a second thin film forming step for forming a thin film, which is composed of a superconductive material or the simulant thereto, on the first circuit layer(14), and a second circuit layer (17) forming step for forming a superconductive circuit by removing a specific component from a predetermined part of the thin film or implanting the component in the thin film.