发明名称 Film removal method
摘要 A method of removing an adhered film from a workpiece includes holding a workpiece having a film to be removed adhered thereto in a stationary position. An adhesive is applied along a length of the film that is less than the length of the entire film. Once the adhesive has been applied, it is pulled away from the workpiece so that the film separates from a portion of the workpiece and may then be completely removed therefrom.
申请公布号 US5006190(A) 申请公布日期 1991.04.09
申请号 US19900474894 申请日期 1990.02.05
申请人 MOTOROLA, INC. 发明人 EARLE, RICHARD W.
分类号 B29C63/00;H01L21/00;H01L23/31 主分类号 B29C63/00
代理机构 代理人
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