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发明名称
METHOD OF MANUFACTURING REFERENCE SAMPLES WITH A RATED IMPURITY LEVEL
摘要
申请公布号
SU1654720(A1)
申请公布日期
1991.06.07
申请号
SU19884449622
申请日期
1988.04.18
申请人
KOZLITIN VLADIMIR P,SU;MILOVZOROV DMITRIJ E,SU
发明人
KOZLITIN VLADIMIR P,SU;MILOVZOROV DMITRIJ E,SU
分类号
G01N1/28
主分类号
G01N1/28
代理机构
代理人
主权项
地址
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