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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03138960(A)
申请公布日期
1991.06.13
申请号
JP19890278064
申请日期
1989.10.24
申请人
SONY CORP
发明人
SATO JUNICHI;GOCHO TETSUO
分类号
H01L21/76;H01L21/205;H01L21/31
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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