发明名称 PARTICLE DETECTION DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a particle detection device that can discriminate the kind of a particle with high accuracy.SOLUTION: A particle detection device 1 comprises a light irradiation unit 10, a first light-receiving unit 20 for outputting a first detection signal S1 that corresponds to the intensity of a first polarization component L21 among scattered light occurring when particles R are irradiated with an irradiation light L13, a second light-receiving unit 30 for outputting a second detection signal S2 that corresponds to the intensity of a second polarization component L31 among the scattered light, and a discrimination processing unit 40 for discriminating the type of particles R, the irradiation light L13 being a linearly polarized light having a polarization axis P12 in the direction of a predetermined angle to a reference direction (x1) perpendicular to the propagation direction (z1) of the irradiation light L13, the first polarization component L21 being a linearly polarized light having a polarization axis P21 in the direction of an angle of +45 degrees to a direction (x2) corresponding to the reference direction, the second polarization component L31 being a linearly polarized light having a polarization axis P31 in the direction of an angle of -45 degrees to a direction (x3) corresponding to the reference direction.SELECTED DRAWING: Figure 1
申请公布号 JP2016170024(A) 申请公布日期 2016.09.23
申请号 JP20150049606 申请日期 2015.03.12
申请人 MITSUBISHI ELECTRIC CORP 发明人 NAKAI KENYA
分类号 G01N15/14;G01N21/21;G01N21/47 主分类号 G01N15/14
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