| 摘要 |
PURPOSE:To suppress the expansion of a gas body and obtain a highly reliable via by performing metal infiltrating works in a pressurized atmosphere. CONSTITUTION:A via is formed by making a molten metallic material 5 to flow into a through hole 3 after a plated layer 4 is formed on the inner surface of the holes bored through a multilayered ceramic substrate 2 formed by piling up and sintering green sheets 1 or a single-layer ceramic substrate formed by sintering a green sheet. When the via is formed, the infiltration of the metallic material 5 into the hole 3 is performed in the atmosphere of a high-pressure inert gas. Therefore, the expansion, etc., of the plated layer 4 associated with the metal infiltrating work can be suppressed and a via having a stable quality can be obtained. |
