METHOD OF MEASURING DIELECTRIC LAYER THICKNESS ON SEMICONDUCTOR SURFACE,申请号SU19894709910-传众专利搜索

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发明名称	METHOD OF MEASURING DIELECTRIC LAYER THICKNESS ON SEMICONDUCTOR SURFACE
摘要
申请公布号	SU1670384(A1)	申请公布日期	1991.08.15
申请号	SU19894709910	申请日期	1989.06.26
申请人	EREVANSKIJ POLT I IM.K.MARKSA	发明人	PANOSYAN ZHOZEF R,SU;BARSEGYAN SEREZHA KH,SU;ADAMYAN OGANES A,SU;CHIBUKHCHYAN KAREN F,SU
分类号	G01B11/06	主分类号	G01B11/06
代理机构		代理人
主权项
地址

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