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发明名称
SEMICONDUCTOR MANUFACTURING APPARATUS
摘要
申请公布号
JPH03190218(A)
申请公布日期
1991.08.20
申请号
JP19890328516
申请日期
1989.12.20
申请人
HITACHI LTD;HITACHI TOKYO ELECTRON CO LTD
发明人
SATO AKIHIKO;UEHARA HIROAKI
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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