DEVICE FOR PRODUCING SEMICONDUCTOR DEVICE,申请号JP19890339658-传众专利搜索

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发明名称	DEVICE FOR PRODUCING SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH03197673(A)	申请公布日期	1991.08.29
申请号	JP19890339658	申请日期	1989.12.26
申请人	NEC CORP	发明人	TSUKAMOTO YASUNOBU
分类号	C23C14/52;H01L21/205;H01L21/302;H01L21/3065	主分类号	C23C14/52
代理机构		代理人
主权项
地址

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