| 摘要 |
PURPOSE:To obtain a cleaning method having an excellent cleaning effect by performing cleaning by a jet of super-pure water having specific resistance of specified value or higher toward objects to be cleaned. CONSTITUTION:Cleaning is performed by jetting super-pure water having specific resistance of 17.0MOMEGA.cm or higher when in terms of temperature at 25 deg.C, toward objects to be cleaned. For example, the super-pure water supplied from a super- pure water supplying device 201 to a water tank 203 is supplied to a force pump 204 heated by a heater 205, and jetted in spray toward surfaces to be cleaned through nozzles 207. On that occasion, stainless steel (material SUS316L), etc., whose surface has been mirror-finished without producing any process deterioration layer by electro polishing technique and which has been oxidation- treated in a highly-pure oxidizing atmosphere having a very low impurity density are used for the liquid-touching parts such as the internal surface of the super- pure water supplying device 201, internal surface of the wafer tank 203, water- passing surfaces of the force pump 204 including its sliding part, internal surface of the heater 205, internal surfaces of the piping, and internal surfaces of the nozzles.
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