Ceramic membrane pressure sensor - has central membrane zone with stiffening region enclosed by inner strain zone and strengthening zone leading to frame section

摘要

A pressure sensor has a ceramic sensor element with a central zone in the form of a membrane with a plane top side. The outer zones form a frame for the membrane. The top side of the membrane carries piezoresistive thick film resistances (21, 22). The membrane (15) has at least one thickened stiffening region (16) enclosed by a thinner strain region (18) and a strengthening region (17) in which it increases uniformly in thickness from the strain region towards the frame (11). ADVANTAGE - Has high resistance to overpressure and produces large useful signal.