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经营范围
发明名称
VAPOR GROWTH SYSTEM
摘要
申请公布号
JPH03268319(A)
申请公布日期
1991.11.29
申请号
JP19900066802
申请日期
1990.03.19
申请人
TOSHIBA CORP;TOUSHIBA MAIKURO EREKUTORONIKUSU KK
发明人
KODAMA SHOICHI;TSUCHIYA TADATOSHI
分类号
H01L21/205;H01L21/31
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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