Control method for plasma discharge coating - uses unbalanced magnetron cathode and discharge voltage regulation by field coil current

摘要

In a method of control of coating of substrates by condensation of particles from a plasma produced by gas discharge, an unbalanced magnetron cathode, pref. very unbalanced cathode, is used and the discharge voltage is regulated by means of the current flowing in a magnetic field coil, surrounding a permanent magnet arrangement. ADVANTAGE - Uniform coating without target poisoning.