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发明名称
FREMGANGSMAADE OG APPARAT TIL ANALYSE AF EN OVERFLADE
摘要
申请公布号
DK161858(C)
申请公布日期
1992.01.20
申请号
DK19850003813
申请日期
1985.08.22
申请人
SRI INTERNATIONAL
发明人
BECKER, CHRISTOPHER H.;GILLEN, KEITH T.;BUTTRILL JR., SIDNEY E.
分类号
G01N23/225;H01J37/252;H01J49/40;H01L21/00;(IPC1-7):G01N21/63;H01J49/16
主分类号
G01N23/225
代理机构
代理人
主权项
地址
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