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经营范围
发明名称
MANUFACTURE OF POLYCRYSTALLINE SILICON THIN FILM
摘要
申请公布号
JPH04144122(A)
申请公布日期
1992.05.18
申请号
JP19900266254
申请日期
1990.10.05
申请人
TOSHIBA CORP
发明人
MASAKI YUICHI;NAKAZONO TAKUSHI;NAKAMURA HIROYOSHI
分类号
H01L21/20;H01L21/324
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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