发明名称 METHOD FOR SETTING/INDICATING MANUFACTURING CONDITION
摘要 <p>PURPOSE:To easily estimate the operation experience and state transition, etc., of each manufacturing device, by providing the function which executes on an indication terminal the picture plane motion corresponding to the indication item of a worker and the indicating confirmation operation of the device setting in a manufacturing conditions indication system. CONSTITUTION:A manufacturing conditions indication system which prepares, accumulates and manages the manufacture specifications of various LSIs on a calculator system, indicating on the terminal scope quickly the pertinent device corresponding manufacturing conditions of the body to be worked for the inquiry from the site installation terminal, and managing the operation experience of a using device with its collection, is provided. Moreover, a software which executes the picture plane motion corresponding to the indication confirmation operation of a worker, just as the conditions are displayed on the terminal picture plane, is provided. Under the circumstances the indication of manufacturing conditions and the indication confirmation of each indication item and device setting becomes steady, and a man can set efficiently each manufacturing conditions on each device.</p>
申请公布号 JPH04193462(A) 申请公布日期 1992.07.13
申请号 JP19900323039 申请日期 1990.11.28
申请人 HITACHI LTD 发明人 TAKAHASHI SHIGERU;SAKATA MASAO;YOSHIHARA NORIO;OKAMOTO NAOYUKI;OKABE TSUTOMU;NAKAZATO JUN;SHIMOSHA SADAO
分类号 B23Q41/08;G05B19/418;H01L21/02 主分类号 B23Q41/08
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