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发明名称
TRANSFER EQUIPMENT
摘要
申请公布号
JPH04199729(A)
申请公布日期
1992.07.20
申请号
JP19900334210
申请日期
1990.11.29
申请人
TOSHIBA CORP;TOKYO ELECTRON LTD
发明人
HASEGAWA ISAHIRO;KANEKO SATOSHI
分类号
B25J9/00;B25J9/06;B25J9/10;H01L21/677;H01L21/687
主分类号
B25J9/00
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代理人
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