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发明名称
METHOD FOR EVALUATING CHARACTERISTICS OF MATTER
摘要
申请公布号
JPH04240553(A)
申请公布日期
1992.08.27
申请号
JP19910006650
申请日期
1991.01.24
申请人
SHIMADZU CORP
发明人
KOBAYASHI YUTAKA
分类号
G01B11/30;G01N21/21;H01L21/66
主分类号
G01B11/30
代理机构
代理人
主权项
地址
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