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发明名称
PRODUCTION OF DIAMOND THIN FILM
摘要
申请公布号
JPH04240191(A)
申请公布日期
1992.08.27
申请号
JP19910006926
申请日期
1991.01.24
申请人
IDEMITSU PETROCHEM CO LTD
发明人
KATSUMATA SATOSHI
分类号
C23C16/26;C23C16/27;C23C16/44;C30B29/04
主分类号
C23C16/26
代理机构
代理人
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