METHOD OF OPTICAL NEAR FIELD MICROLITHOGRAPHY AND MICROLITHOGRAPHY DEVICES IMPLEMENTING SAME,申请号HU19920000910-传众专利搜索

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发明名称	METHOD OF OPTICAL NEAR FIELD MICROLITHOGRAPHY AND MICROLITHOGRAPHY DEVICES IMPLEMENTING SAME
摘要
申请公布号	HU9200910(D0)	申请公布日期	1992.08.28
申请号	HU19920000910	申请日期	1990.09.21
申请人	SOCIETE SPIRAL RECHERCHE ET DEVELOPMENT,FR	发明人	DE FORNEL,FREDERIQUE,FR;GOUDONNET,JEAN-PIERRE,FR;MANTOVANI,JAMES,US
分类号	G03F7/20;H01J37/304;H01L21/027	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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