发明名称 |
ARC SOURCE MACROPARTICLE FILTER |
摘要 |
2106598 9216959 PCTABS00016 An arc source macroparticle filter (1) includes a circular cathode (2) for emitting particles and an extended cylindrical anode (3) adjacent to and co-axial with the cathode for accelerating the emitted particles. Torroids (4) generate a magnetic field to define a continuous non-linear plasma duct (5) for directing charged particles and separating therefrom undesirable larger particles. The duct is minimally non-linear to permit high rates of charged particle transmission. Arc source filter (1) allows heating and/or the deposition of a variety of surface coatings to a workpiece (8). Also claimed is a method of producing vanadium dioxide.
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申请公布号 |
CA2106598(A1) |
申请公布日期 |
1992.09.26 |
申请号 |
CA19922106598 |
申请日期 |
1992.03.25 |
申请人 |
COMMONWEALTH SCIENTIFIC AND INDUSTRIAL RESEARCH ORGANISATION |
发明人 |
MARTIN, PHILIP J.;NETTERFIELD, ROGER P.;KINDER, TERENCE J. |
分类号 |
H01J27/08;C23C14/08;C23C14/22;H01J37/05;H01J37/08;H01J37/317;H01J37/32;H01J37/36;H01L21/265;H01L21/31;H01L21/314;H01L21/316;H05H1/46;(IPC1-7):H01J33/00;C23C14/02;H01J37/04;H05H1/10;C23C14/16;C23C14/32 |
主分类号 |
H01J27/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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