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发明名称
METHOD AND APPARATUS FOR CLEANING OF SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
JPH04342130(A)
申请公布日期
1992.11.27
申请号
JP19910114609
申请日期
1991.05.20
申请人
TOSHIBA CORP
发明人
NISHIKI KAZUHIRO
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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