MASS-SPECTROMETERING DEVICE FOR DIAGNOSING PLASMA-CHEMICAL PROCESSORS,申请号SU19904872174-传众专利搜索

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发明名称	MASS-SPECTROMETERING DEVICE FOR DIAGNOSING PLASMA-CHEMICAL PROCESSORS
摘要
申请公布号	RU1780131(C)	申请公布日期	1992.12.07
申请号	SU19904872174	申请日期	1990.07.26
申请人	SP K BYURO MIKROELEKTRONIKI VYCHISLITELNOJ TEKHNIKI AN SSSR;INST MIKROELEKTRONIKI AN SSSR	发明人	SMIRNOV VALERIJ K,SU;TIKHOMIROV ANATOLIJ V,SU;KOTIKOV EDUARD N,SU
分类号	H01J49/26	主分类号	H01J49/26
代理机构		代理人
主权项
地址

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