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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04354145(A)
申请公布日期
1992.12.08
申请号
JP19910157688
申请日期
1991.05.30
申请人
MITSUBISHI ELECTRIC CORP
发明人
FURUYA MASAKO
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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