发明名称 Laser ablation process for preparing a superconducting thin film formed of compound oxide superconductor material and apparatus for executing such process.
摘要 <p>A laser ablation process for preparing a compound oxide thin film characterized in that an electrode is arranged between a substrate and a target. While the film is formed by laser ablation, a bias voltage is applied between the electrode and the target.</p>
申请公布号 EP0518778(A2) 申请公布日期 1992.12.16
申请号 EP19920401636 申请日期 1992.06.12
申请人 SUMITOMO ELECTRIC INDUSTRIES, LTD. 发明人 NAGAISHI,TATSUOKI;OTA, NOBUHIRO;FUJIMORI, NAOJI
分类号 C23C14/08;C23C14/06;C23C14/24;C23C14/28;C30B29/22;H01B12/06;H01L39/24 主分类号 C23C14/08
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