发明名称 |
Laser ablation process for preparing a superconducting thin film formed of compound oxide superconductor material and apparatus for executing such process. |
摘要 |
<p>A laser ablation process for preparing a compound oxide thin film characterized in that an electrode is arranged between a substrate and a target. While the film is formed by laser ablation, a bias voltage is applied between the electrode and the target.</p> |
申请公布号 |
EP0518778(A2) |
申请公布日期 |
1992.12.16 |
申请号 |
EP19920401636 |
申请日期 |
1992.06.12 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LTD. |
发明人 |
NAGAISHI,TATSUOKI;OTA, NOBUHIRO;FUJIMORI, NAOJI |
分类号 |
C23C14/08;C23C14/06;C23C14/24;C23C14/28;C30B29/22;H01B12/06;H01L39/24 |
主分类号 |
C23C14/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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