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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH04369843(A)
申请公布日期
1992.12.22
申请号
JP19910174506
申请日期
1991.06.18
申请人
MITSUBISHI ELECTRIC CORP
发明人
NAGAHAMA KOKI
分类号
H01L21/302;H01L21/3065;H01L21/338;H01L29/205;H01L29/778;H01L29/812
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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