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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0513682(A)
申请公布日期
1993.01.22
申请号
JP19910161318
申请日期
1991.07.02
申请人
MITSUBISHI ELECTRIC CORP
发明人
KOBIKI MICHIHIRO
分类号
H01L21/822;H01L27/04
主分类号
H01L21/822
代理机构
代理人
主权项
地址
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