INSULATING FILM FORMING METHOD,申请号JP19910183611-传众专利搜索

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发明名称	INSULATING FILM FORMING METHOD
摘要
申请公布号	JPH0513405(A)	申请公布日期	1993.01.22
申请号	JP19910183611	申请日期	1991.06.28
申请人	SONY CORP	发明人	SASAKI NAOTO;AMAGASAKI YOSHIHIRO
分类号	H01L21/312;H01L21/768;H01L23/522	主分类号	H01L21/312
代理机构		代理人
主权项
地址

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