SEMICONDUCTOR MANUFACTURING EQUIPMENT,申请号JP19910238433-传众专利搜索

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发明名称	SEMICONDUCTOR MANUFACTURING EQUIPMENT
摘要
申请公布号	JPH0582444(A)	申请公布日期	1993.04.02
申请号	JP19910238433	申请日期	1991.09.18
申请人	FUJITSU LTD	发明人	SUZUKI MASAFUMI
分类号	C23C14/34;H01L21/203;H01L21/205;H01L21/285	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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