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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0590280(A)
申请公布日期
1993.04.09
申请号
JP19910078517
申请日期
1991.03.18
申请人
NIPPON TELEGR & TELEPH CORP <NTT>
发明人
UGAJIN MAMORU;KONAKA NOBUNORI;SAKAKIBARA YUTAKA;TAKAHASHI MITSUTOSHI
分类号
H01L21/265;H01L21/331;H01L29/73
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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